学会発表

国際会議発表論文(査読有)

国際会議発表論文(査読有)

    1. Yuko Aono, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe, Novel Crystallization Temperature Measurement Method for Combinatorial Evaluation using Infrared Thermography, Proc. of 2009 MRS Spring Meeting, 1159E, G1-4. CD-ROM (2009.4, San Francisco, USA), (Oral)
    2. Sheng Wang, Dongming Sun, Seiichi Hata and Akira Shimokohbe, A cylindrical ultrasonic linear microactuator, Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008), CD-ROM (2008 Oct. 7-10. Northwestern, Evanston, USA) (Oral)
    3. Seiichi Hata, Ryusuke Yamauchi, Taiyo Ueshima, Junpei Sakurai and Akira Shimokohbe, Search for Novel MEMS Materials using a Combinatorial Method, Proceedings of 3rd JSME/ASME International Conference on Materials and Processing (ICM&P 2008), CD-ROM (2008 Oct. 7-10. Northwestern, Evanston, USA) (Postor)
    4. Junpei Sakurai, Seiichi Hata, Mitsuhiro Abe, Yuko Aono and Akira Shimokohbe, Combinatorial evaluation of heat and oxidation resistances of Ni-Nb-Zr thin film amorphous alloys, Processings of 5th International Conference on Combinatorial and High-Throughput Materials Science. 1035 (2008, Sep. Germany), (Poster)
    5. Dongming Sun, Sheng Wang, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe, Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator, Book of abstracts in 34th International Conference on Micro & Nano Engineering (MNE 2008), 117 (2008. September 15-18, Athens, Greece), (Oral)
    6. Yuko Aono, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe, New Measurement Method for Crystallization Temperature of Thin Film Amorphous Alloy, JUNIOR EUROMAT 2008, CD-ROM (2008. Jul.14-18, Lausanne, Switzerland), (Oral)
    7. Wang Sheng, Dongming Sun, Seiichi Hata and Akira Shimokohbe, A novel cylindrical ultrasonic linear microactuator, Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Zurich 2008), 456-459 (2008.May 18-22.Zurich, Switzerland), (Poster)
    8. Masaaki Otsu, Yuki IDE, Junpei Sakurai, Seiichi Hata, Kazuki Takashima, Laser Forming of Pd-Based Thin Film Metallic Glass, Proc. 4th KU-KITECH Symposium on Bulk Metallic Glasses and Advanced Materials, 56, (2008.5, Kumamoto, Japan)
    9. J. Sakurai, S. Hata, R. Yamauchi, H. Tachikawa and A. Shimokohbe: Combinatorial Searching for Nobel Metal-based Amorphous Alloy Thin Films for Glass Lens Mold, Proc. of 2007 MRS Fall Meeting A1.6 CD-ROM (2007.11, Boston, MA, USA), (Oral)
    10. M. Abe, S. Hata, R. Yamauchi, J. Sakurai and A. Shimokohbe: Combinatorial Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Glass Lens Mold, Proc. of 2007 MRS Fall Meeting A6.14 CD-ROM (2007.11, Boston, MA, USA), (Poster)
    11. Y. Aono, S. Hata, J. Sakurai, R. Yamauchi, H. Tachikawa and A. Shimokohbe: Basic Research on Combinatorial Evaluation Method for Coefficient of Thermal Expansion, Proc. of 2007 MRS Fall Meeting A6.8 CD-ROM (2007.11, Boston, MA, USA), (Poster)
    12. Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe: Behavior of joining interface between thin film metallic glass and silicon nitride at heating, Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC), 56 (2007. 5. 23-25, Kanagawa), (Poster)
    13. R. Tanabe, S. Hata, A. Shimokohbe: A Disposable Concept Laminated MEMS Hematology Chip, Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology, 1, 45-48, (2007 Bremen, Germany),(Oral)
    14. Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe: Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy, Proc. of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA) , (Poster)
    15. Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe: Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature, Proc. of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA),(Poster)
    16. Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe: Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses, Proc. of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA) , (Oral)
    17. Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa and Akira Shimokohbe: Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass, Proc. of 18th International Congress of Mechanical Engineering (COBEM 2005), CD-ROM (2005.11, Ouro Preto, Brazil), (Oral)
    18. T. Fukushige, S. Hata and A. Shimokohbe: Integrated conical spring linear actuators for tilting-mirror applications, Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005), pp. 12-13 (2005.9 Vienna, Austria), (Oral)
    19. R. Tanabe, S. Hata and A. Shimokohbe: A complete blood count micro sensor designed to reduce noise from electrolysis gas, Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005), pp.622-623,(2005.9 Vienna, Austria), (Oral)
    20. T. Fukushige, S. Hata, Takehiko Hayashi, and A. Shimokohbe: Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range, Proc. IPACK2005, CD-ROM, pp. IPACK2005-73145, (2005.6. San Francisco, USA), (Oral)
    21. Seiichi Hata, Junpei Sakurai and Akira Shimokohbe: Thin Film Metallic Glasses as New MEMS Materials, Technical Digest of The 18th IEEE International Conference on MEMS 2005, 479-482, (2005.1. Miami, USA), (Poster)
    22. J. Sakurai, S. Hata and A. Shimokohbe: Novel fabrication method of metallic glass thin film using carousel type sputtering system, Proc. of SPIE Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, 260-267, (2004. 12. Sydney, Australia), (Oral)
    23. T. Fukushige, S. Hata and A. Shimokohbe: A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking, Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004), 15-16 (2004.6.Glasgow, Scotland), (Poster)
    24. S. Hata, H. W. JEONG and A. Shimokohbe: 2-DOF thin film metallic glass microactuator, Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004), 9-10 (2004.6.Glasgow, Scotland), (Oral)
    25. T. Fukushige, S. Hata and A. Shimokohbe: Large-output-force out-of-plane MEMS actuator array, Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology, vol. 5276, 240-248 (2003.12.Perth, Australia), (Oral)
    26. Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai and Akira Shimokohbe: Micro dome shape structures made of thin film metallic glass, Micro System Technology 2003 (MST ’03), 180-187 (2003. 10.7-8 Munich, Germany) , (Oral)
    27. J. Sakurai, S. Hata and A. Shimokohbe: Reduction of electrical resistivity in PdCuSi thin film metallic glass, Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM’03), CD-ROM (2003. 9.10-12 Nagoya, Japan) , (Oral)
    28. Seiichi Hata, The Application of Thin Film Metallic Glasses to 3D Micro Actuators, Proceedings of International Symposium on Smart Actuators and Sensors,1-8 (2003. 7.18 Tokyo, Japan) (Invited speaking)
    29. Seiichi Hata, Takashi Fukushige and Akira Shimokohbe, Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass, Proceedings of CPT2002, 162-167 (2002.10. Daejeon, Korea), (Oral)
    30. Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe: Fabrication and Evaluation of On-Chip Micro Variable Inductor: Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002), 210-211 (2002.9. Lugano, Switzerland) , (Poster)
    31. Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE: On-Chip Variable Inductor Using MEMS Technology; Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials, 306-307 (2002.9. Nagoya, JAPAN), (Oral)
    32. Seiichi Hata, Tokokazu Kato, Takashi Fukushige and Akira Shimokohbe: Integrated Conical Soring Linear Actuator, Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002), 208-209 (2002.9. Lugano, Switzerland), (Poster)
    33. Hee-Won JEONG, Seiichi HATA and Akira SHIMOKOHBE: Micro-Forming of Thin Film Metallic Glass by Local Laser Heating; Technical Digest of The 15th IEEE International Conference on MEMS 2002, 372-375 (2002.1. Las Vegas, USA), (Poster)
    34. Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA and Akira SHIMOKOHBE: A Micro Lens Actuator for Optical Flying Head; Technical Digest of The 15th IEEE International Conference on MEMS 2002, 507-510 (2002.1. Las Vegas, USA), (Poster)
    35. S. HATA, Y. LIU, T. KATO and A. SHIMOKOHBE: Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region; Proceedings of 10th International Conference on Precision Engineering (ICPE), 37-41 (2001. 7. Yokohama, Japan), (Oral)
    36. Y. LIU, S. HATA, K. WADA and A. SHIMOKOHBE: Thin Film Metallic Glasses: Fabrication and Property Test; Technical Digest of The 14th IEEE International Conference on MEMS 2001, 102-105 (2001.1. Interlaken, Switzerland), (Poster)
    37. K. SATO, K. ITO, S. HATA and A. SHIMOKOHBE: Self-alignment of Microparts Using Liquid Surface Tension – Examination of the Alignment Characteristics -, Proceedings of ASPE’s 15th Annual Meeting, 345-348 (2000. Arizona, USA), (Oral)
    38. K. SATO, S. HATA and A. SHIMOKOHBE: Self-alignment for Microparts Assembly using Water Surface Tension; Proceedings of SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS’99, 3892, 321-328 (1999.10.Queensland, Australia), (Oral)
    39. S. HATA, K. SATO and A. SHIMOKOHBE: Fabrication of Thin Film Metallic Glass and its Application to Microactuator; SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS’99, 3892, 97-108 (1999.10.Queensland, Australia), (Oral)
    40. S. HATA, N. YAMADA, Y. SAOTOME, A. INOUE and A. SHIMOKOHBE: Precision and Micro Machining of Metallic Glasses -Formability of Zr Based Metallic Glasses in the Supercooled Liquid State-; Proceedings of China-Japan Bilateral Symposium on Advanced Manufacturing Engineering, 81-86 (1998.10. Yellow Mt., China), (Oral)
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